Nano LOR B Series Resist

MSDS File

272.pdf

Type

photoresist polymer; solvent

Cas Number

120-92-3; 107-98-2; 123209-67-6

Ingredients

cyclopentanone [120-92-3] polyaliphatic imide copolymer [123209-67-6] proprietary dye proprietary surfactant propylene glycol methyl ether [107-98-2]

Grade

Health

2

Flammability

3

Reactivity

1

Special Hazard

HMIS Personal Safety Letter