Tantalum Etch III

MSDS File

438.doc

Type

etchant

Cas Number

7732-18-5; 7697-37-2; 7664-39-3

Ingredients

hydrofluoric acid [7664-39-3] nitric acid [7697-37-2] water [7732-18-5]

Grade

Health

3

Flammability

0

Reactivity

1

Special Hazard

HMIS Personal Safety Letter