XR-1541 E-Beam Resist

MSDS File

457.pdf

Type

photoresist

Cas Number

108-10-1; 137125-44-1; 108-88-3

Ingredients

hydrogen silsesquioxane [137125-44-1] methyl isobutyl ketone [108-10-1] toluene [108-88-3]

Grade

Health

2

Flammability

3

Reactivity

1

Special Hazard

HMIS Personal Safety Letter