PGMI SF Series Resist (Organic Polymer Solution)

MSDS File

466.pdf

Type

organic polymer

Cas Number

120-92-3; 97-99-4; 102322-80-5

Ingredients

cyclopentanone [120-92-3] polyaliphatic imide copolymer [102322-80-5] proprietary surfactant tetrahydrofurfuryl alcohol [97-99-4]

Grade

Health

2

Flammability

3

Reactivity

0

Special Hazard

HMIS Personal Safety Letter