LOR A Series Resist

MSDS File

572.pdf

Type

organic polymer

Cas Number

120-92-3, 107-98-2, 102322-80-5

Ingredients

cyclopentanone. propylene glycol monomethyl ether polyaliphatic imide copolymer proprietary dye proprietary surfactant

Grade

Health

1

Flammability

3

Reactivity

0

Special Hazard

HMIS Personal Safety Letter