Equipment

Equipment Location
Abrasive Blast Cabinet Assembly Lab
ALD1 Cleanroom - Marcus Inorganic
ALD2 Cleanroom - Marcus Inorganic
AMSCOPE IN300TB Inverted Microscope Cleanroom - Marcus Organic
BGA Rework Station Assembly Lab
Biacore T200 SPR Cleanroom - Marcus Organic
Bioforce Nano eNabler Printer/Patterner Cleanroom - Marcus Organic
Bio Lion XC-530 Centrifuge Cleanroom - Marcus Organic
Black Magic PECVD Cleanroom - Marcus Inorganic
BLE Spinner Cleanroom - Marcus Inorganic
Bowoptic Stress Measurement Cleanroom - Marcus Inorganic
BSA Chuck Checkout Cleanroom - Pettit
Cambridge NanoTech Plasma ALD - Metal (left) Cleanroom - Marcus Inorganic
Cambridge NanoTech Plasma ALD - Oxide (right) Cleanroom - Marcus Inorganic
CHA E-beam Evaporator 1 (dielectrics) Cleanroom - Marcus Inorganic
CHA E-beam Evaporator 2 (metals) Cleanroom - Marcus Inorganic
Cleanroom User Forum - Fall Series Lab - Pettit 1st Floor
CMOS Boat Checkout Cleanroom - Pettit
CMOS Cleaning Station (Marcus) Cleanroom - Marcus Inorganic
CMOS Cleaning Station (Pettit) Cleanroom - Pettit
CMOS Spin Rinse Dryer (Inorganic) Cleanroom - Marcus Inorganic
CMOS Spin Rinse Dryer - Pettit Cleanroom - Pettit
Contact Angle Measurement System Cleanroom - Marcus Organic
Cressington 108A Carbon Coater Marcus Microscopy 1
CVC DC Sputterer Cleanroom - Pettit
CVC E-Beam Evaporator 1 Cleanroom - Pettit
CVC E-Beam Evaporator 2 -- Instructional Center Cleanroom - Pettit
CVD FirstNano Graphene Furnace 1 Cleanroom - Marcus Inorganic
CVD FirstNano Graphene Furnace 2 Cleanroom - Marcus Inorganic
CVD FirstNano SiGe Nanowire Furnace Cleanroom - Marcus Inorganic
Dage Shear Tester Assembly Lab
Dage X-Ray XD7600NT Lab - Pettit 160
Dektak 150 Profilometer Cleanroom - Marcus Inorganic
Dektak 150 Profilometer -- Instructional Center Cleanroom - Pettit
Denton Discovery 2 Cleanroom - Marcus Inorganic
Denton Discovery - RF/DC Sputterer Cleanroom - Marcus Inorganic
Denton Explorer - E-beam Evaporator Cleanroom - Marcus Inorganic
Denton Infinity Cleanroom - Marcus Inorganic
Dicing Saw Cleanroom - Pettit
EBL CEE Spinner Cleanroom - Pettit
EVG 101 Spin Coater Cleanroom - Marcus Inorganic
EVG 620 Mask Aligner Cleanroom - Marcus Inorganic
FEI Nova Nanolab 200 FIB/SEM Marcus Microscopy 1
FEI Quanta 200 3D FIB/SEM Lab - Pettit 1st Floor
Finetech Sub-micron Flip-chip Bonder Lab - Pettit 160
FTIR Spectrometer Cleanroom - Marcus Organic
Fumehood 1 Left Cleanroom - Marcus Inorganic
Fumehood 1 Right Cleanroom - Marcus Inorganic
Fumehood 2 Left Cleanroom - Marcus Inorganic
Fumehood 2 Right Cleanroom - Marcus Inorganic
Fumehood 3 Left Cleanroom - Marcus Inorganic
Fumehood 3 Right Cleanroom - Marcus Inorganic
Gasonics Asher Cleanroom - Pettit
Gasonics Asher (Inorganic) Cleanroom - Marcus Inorganic
Heraeus Vacuum Oven - Inorganic Cleanroom - Marcus Inorganic
Heraeus Vacuum Oven - Pettit Cleanroom - Pettit
Hermes LS500XL CO2 laser Lab - Pettit 161
High Speed Optical Signal Testing GEDC
Hitachi HD-2700 200kV STEM Marcus Microscopy 4
Hitachi HT7700 TEM Marcus Microscopy 1
Hitachi S-3500H SEM Lab - Pettit 160
Hitachi S-3700N VP-SEM Cleanroom - Marcus Organic
Hitachi S-4700 FE-SEM Cleanroom - Marcus Inorganic
Hitachi SU8230 Marcus Microscopy 4
Hitachi ZoneSEM Marcus Microscopy 4
Hitachi ZoneTEM Marcus Microscopy 1
Hummer 5 Gold/Palladium Sputterer Cleanroom - Pettit
Hummer 6 Gold/Palladium Sputterer Marcus Microscopy 1
Hummer XP Gold Sputterer Cleanroom - Marcus Inorganic
Hydrofluoric (HF) Vapor Etcher Cleanroom - Marcus Inorganic
Hysitron TriboIndenter Marcus Microscopy 4
IEN Technical Forum Pettit Classroom Class Entrance
Image Reversal Oven Cleanroom - Marcus Inorganic
IONTOF Time-of-Flight SIMS Marcus Microscopy 1
JEOL JBX-9300FS EBL System Cleanroom - Pettit
JetLabII Ink-jet Printer Cleanroom - Marcus Organic
Karl Suss MA-6 Mask Aligner - Inorganic Cleanroom - Marcus Inorganic
Karl Suss MA-6 Mask Aligner - Instructional Center Cleanroom - Pettit
Karl Suss MA-6 Mask Aligner - Pettit Cleanroom - Pettit
Karl Suss RC8 Spinner - Inorganic Cleanroom - Marcus Inorganic
Karl Suss RC8 Spinner - Pettit Cleanroom - Pettit
Karl Suss SB6 Bonder Cleanroom - Marcus Inorganic
Karl Suss SB8E Bonder Cleanroom - Marcus Inorganic
Karl Suss TSA MA-6 Mask Aligner Cleanroom - Marcus Inorganic
Keyence VHX-600 Digital Microscope Marcus Microscopy 2
Kratos XPS Marcus Microscopy 2
K&S 1472 Wire Bonder 1 Lab - Marcus Lapper & Polishing Room
K&S 1472 Wire Bonder 2 Lab - Marcus Lapper & Polishing Room
K&S 4522 Ball Bonder Assembly Lab
K&S 4523A Wedge Wire Bonder Assembly Lab
K&S 4523 Ball Wire Bonder Assembly Lab
K&S Manual Wire Bonder Pettit 160 Lab - Pettit 160
Laser 1 -
Laurell Spinner Cleanroom - Marcus Inorganic
LEO 1530 FE-SEM Cleanroom - Pettit
Lesker E-beam Evaporator - Soft-Lithography Cleanroom - Marcus Organic
LFE Barrel Etcher Cleanroom - Marcus Organic
Lindberg Furnace 1 (CMOS Sintering Tube) Cleanroom - Pettit
Lindberg Furnace 2 (Polymer Curing Tube) Cleanroom - Pettit
Lindberg Furnace 3 (Oxidation Tube) Cleanroom - Pettit
Lindberg Furnace 4 (Polymer Curing Tube) Cleanroom - Pettit
Logitech LP50 Lapper Lab - Marcus Lapper & Polishing Room
Logitech PM5 Polisher 1 Lab - Marcus Lapper & Polishing Room
Logitech SS Bonder Lab - Marcus Lapper & Polishing Room
MakerBot Replicator 3D Printer Cleanroom - Marcus Organic
Malvern Zetasizer Cleanroom - Marcus Organic
Manual Flip Chip Bonder Assembly Lab
MEMS Boat Checkout Cleanroom - Pettit
MEMS Spin Rinse Dryer Cleanroom - Pettit
MEMS Wet Bench Cleanroom - Pettit
Microfuge 18 Micro-centrifuge Cleanroom - Marcus Organic
Microscope 1 - Instructional Center Cleanroom - Pettit
Microscope 2 - Instructional Center Cleanroom - Pettit
Microscope 4 - IR (infrared) Cleanroom - Pettit
Microscope M1 Cleanroom - Marcus Inorganic
Microscope M2 Cleanroom - Marcus Inorganic
Microscope M3 - Soft-lithography Cleanroom - Marcus Organic
Microscope M4 Cleanroom - Marcus Inorganic
Microscope M5 Cleanroom - Marcus Inorganic
Microscope P1 Cleanroom - Pettit
Microscope P2 Cleanroom - Pettit
Microscope P3 Cleanroom - Pettit
Microscope P4 Cleanroom - Pettit
Microscope P5 Cleanroom - Pettit
Microscope - Soft-lithography Cleanroom - Marcus Organic
Microtech Laserwriter LW405 Cleanroom - Marcus Inorganic
Millimeter-Wave Test-Bed GEDC
Mini Tystar Tube 1 Cleanroom - Marcus Inorganic
Mini Tystar Tube 2 Cleanroom - Marcus Inorganic
Mini Tystar Tube 3 Cleanroom - Marcus Inorganic
MPM Screen Printer Lab - Pettit 165
MRL Furnace - Tube 3 Cleanroom - Marcus Inorganic
MRL Furnace - Tube 4 Cleanroom - Marcus Inorganic
MT Property Tester Cleanroom - Marcus Organic
Nanospec Reflectometer - Inorganic Cleanroom - Marcus Inorganic
Nanospec Reflectometer - Pettit Cleanroom - Pettit
Necropsy 2nd Floor Computer Lab
Nova FIB Micromanipulator Lab - Pettit 1st Floor
Obducat Nano-imprinter (NIL) Cleanroom - Pettit
Olympus DSX-500 digital microscope -
Olympus LEXT 3D Material Confocal Microscope Cleanroom - Marcus Organic
Olympus MX50 Microscope Cleanroom - Marcus Organic
Olympus MX61 Microscope - Pettit Cleanroom - Pettit
Olympus RU-3 Microspectrophotometer -
Oxford Cryogenic ICP Cleanroom - Marcus Inorganic
Oxford End-point RIE Cleanroom - Marcus Inorganic
Oxford ICP PECVD Cleanroom - Marcus Inorganic
Oxford PECVD right Cleanroom - Marcus Inorganic
Peel Tester Assembly Lab
Photolithography Training Cleanroom - Marcus Inorganic
Plasma-Etcher Plasma Cleaner Marcus Microscopy 1
PlasmaTherm ICP Cleanroom - Pettit
Plasma-Therm PECVD Cleanroom - Pettit
Plasma-Therm RIE Cleanroom - Pettit
Plasma-Therm SLR RIE Cleanroom - Pettit
Plas-Mos Ellipsometer Cleanroom - Pettit
Plating Station 1 Cleanroom - Marcus Inorganic
Plating Station 2 Cleanroom - Marcus Inorganic
Plating Station 3 Cleanroom - Marcus Inorganic
Plating Station 4 Cleanroom - Marcus Inorganic
Probe Station Bonder Room Assembly Lab
PVD75 Filament Evaporator Cleanroom - Marcus Inorganic
PVD75 RF Sputterer Cleanroom - Marcus Inorganic
PVD Filament Evaporator (Instructional Lab) Cleanroom - Pettit
Q-sense QCM-D Cleanroom - Marcus Organic
Quick Circuit 7000 PCB Milling Machine Assembly Lab
Raman Spectrometer Marcus Microscopy 4
Resonetics IR laser Lab - Pettit 161
Samco UV Ozone Dry Stripper Cleanroom - Marcus Inorganic
Schmid APCVD Cleanroom - Marcus Inorganic
SCS G3P8 Spin Coater 1 (small pieces) Cleanroom - Marcus Inorganic
SCS G3P8 Spin Coater 2 - Pettit Cleanroom - Pettit
SCS G3P8 Spin Coater 3 - Inorganic Cleanroom - Marcus Inorganic
SCS G3P8 Spin Coater - Instructional Center Cleanroom - Pettit
SCS G3P8 Spin Coater - Pettit Cleanroom - Pettit
SCS G3P8 Spinner - Soft-lithography Cleanroom - Marcus Organic
SCS Parylene Coater Lab - Pettit 160
Semiautomatic Screen Printer Assembly Lab
Semi-Automatic Wire Bonder GEDC
SemiTest SCA-2500 Surface Charge Analyzer Cleanroom - Pettit
Semitool Spin Rinse Dryer -- Instructional Center Cleanroom - Pettit
Semprex Spectrometer -- Instructional Center Cleanroom - Pettit
Signatone Four-point Probe Cleanroom - Pettit
Signatone Probe Station Cleanroom - Marcus Inorganic
Soft-Lithography Training Cleanroom - Marcus Organic
Solder Reflow Oven Assembly Lab
Solvent Fumehood Left Cleanroom - Marcus Inorganic
Solvent Fumehood Right Cleanroom - Marcus Inorganic
SSI RTP Cleanroom - Marcus Inorganic
STS AOE ICP Cleanroom - Pettit
STS HRM ICP Cleanroom - Marcus Inorganic
STS ICP Cleanroom - Pettit
STS PECVD Cleanroom - Pettit
STS PECVD 2 Cleanroom - Pettit
STS PECVD 3 Cleanroom - Marcus Inorganic
STS Pegasus ICP Cleanroom - Pettit
STS SOE ICP Cleanroom - Pettit
Sulfurization furnace Cleanroom - Marcus Inorganic
Surrey CNT NanoGrowth Cleanroom - Marcus Inorganic
Suss AltaSpray Spray Coater Cleanroom - Marcus Inorganic
Suss MJB4 Cleanroom - Marcus Organic
SWC 3000-C Mask Cleaner Cleanroom - Marcus Inorganic
Technics Micro PD -- Instructional Center Cleanroom - Pettit
Technics RIE - Soft-lithography Cleanroom - Marcus Organic
Tencor P15 Profilometer Cleanroom - Pettit
Tencor P15 Profilometer (left) Cleanroom - Marcus Inorganic
Tencor P15 Profilometer (right) Cleanroom - Marcus Inorganic
Thermo K-Alpha XPS Marcus Microscopy 2
Thermo Scientific Precision Oven Cleanroom - Marcus Inorganic
Thermo XPS Storage Marcus Microscopy 1
Tousimis Super Critical Dryer Cleanroom - Pettit
Tousimis Super Critical Dryer Cleanroom - Marcus Inorganic
Tystar Nitride Furnace 1 Cleanroom - Pettit
Tystar Nitride Furnace 2 Cleanroom - Pettit
Tystar Nitride Furnace 3 Cleanroom - Pettit
Tystar Nitride Furnace 4 Cleanroom - Pettit
Tystar Poly Furnace 1 Cleanroom - Pettit
Tystar Poly Furnace 2 Cleanroom - Pettit
Tystar Poly Furnace 3 Cleanroom - Pettit
Tystar Poly Furnace 4 Cleanroom - Pettit
Ultratech Plate Cleaner Cleanroom - Pettit
Unaxis PECVD Cleanroom - Pettit
Unaxis RIE Cleanroom - Marcus Inorganic
Unifilm Sputterer Cleanroom - Marcus Inorganic
Unifilm Storage Box Left Cleanroom - Marcus Inorganic
Unifilm Storage Box Right Cleanroom - Marcus Inorganic
UV-VIS Spectrophotometer Cleanroom - Marcus Organic
Veeco AFM Marcus Microscopy 4
Veeco AFM II Dimension 3100 Marcus Microscopy 2
Veeco Four-point Probe -- Instructional Center Cleanroom - Pettit
Veeco NT3300 Cleanroom - Marcus Organic
Verteq Spin Rinse Dryer -- Instructional Center Cleanroom - Pettit
Vision RIE 1 Cleanroom - Pettit
Vision RIE 2 Cleanroom - Marcus Inorganic
VWR Oven Marcus Microscopy 1
VWR Oven Cleanroom - Marcus Inorganic
VWR Oven Cleanroom - Marcus Organic
Wafer Inspection Camera Cleanroom - Pettit
Woollam Ellipsometer Cleanroom - Pettit
Woollam M2000 Ellipsometer Cleanroom - Marcus Inorganic
Woollam Vase Ellipsometer Cleanroom - Marcus Inorganic
Wyko Profilometer NT3300 Cleanroom - Marcus Inorganic
Wyko Profilometer NT3300 Cleanroom - Marcus Organic
Xactix Xenon Difluoride Etcher Cleanroom - Marcus Inorganic
YES-R1 Plasma Cleaner Cleanroom - Pettit
Zeiss Ultra60 FE-SEM Marcus Microscopy 3