Tencor P15 Profilometer
The KLA Tencor P15 is a robust, programmable stylus profiler system that provides 2D and 3D topographic measurements.
-364um max step height
-6" sample or smaller
-2um radius, 60 degree tip
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Cleanroom - Pettit
Shared DriveAccess Shared Drive
Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS) To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.
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Standard Recipes and Reports
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User Shared Files
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There are no hourly rates for this equipment. You will only be charged for cleanroom time.
See our rates for more information.
You must first log in to see service requests for the Tencor P15 Profilometer.
You must first log in to see the equipment log for the Tencor P15 Profilometer.
Training SessionsTraining for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS) To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.