Heraeus Vacuum Oven - Inorganic

Description

The Heraeus Vacuum Oven used for heating of substrates under 5-10 milliTorr Vacuum - up to 350C under vacuum. The oven can be programmed to ramp, dwell, and cool down due to the user's specifications. The vacuum pressure for this oven (top oven) under nitrogen atmosphere can be controlled using a throttle-valve and nitrogen MFC.

Status

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Tool Owners

  • Thomas Johnson-Averette

Location

Cleanroom - Marcus Inorganic

Capabilities

None listed.

Shared Drive

Access Shared Drive

Schedule

Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

Heraeus Vacuum Oven - Pettit

The Heraeus Vacuum Oven used for heating of substrates under 5-10 milliTorr Vacuum - up to 350C under vacuum. The oven can be programmed to ramp, dwell, and cool down due to the user's specifications.

Location

Cleanroom - Pettit

Location

Cleanroom - Marcus Inorganic

VWR Oven

Vacuum ovens are used for a wide variety of vacuum drying, curing, and moisture content testing. common applications include drying heat sensitive samples, moisture determination, and drying samples under a controlled atmosphere.

Location

Cleanroom - Marcus Inorganic

Standard Recipes and Reports

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User Shared Files

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Billing Rates

There are no hourly rates for this equipment. You will only be charged for cleanroom time.

See our rates for more information.

Service Requests

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Equipment Log

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Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.

Cleanroom

The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100