This equipment requires radiation training

JEOL JBX-9300FS EBL System

Description

An electron beam lithography system which has a specified resolution of 20 nm at 100 pA beam current. The system can pattern a wide variety of substrate sizes and can align to pre-existing patterns.

4 nm diameter Gaussian spot electron beam
50 kV/100 kV accelerating voltage
50 pA - 100 nA current range
50 MHz scan speed
+/- 100 um vertical range automatic focus
+/- 2 mm vertical range manual focus
ZrO/W thermal field emission source
vector scan for beam deflection
small pieces (3x5 mm) up to max 300 mm (12") wafers with 9" of writing area
20 nm line width writing at 100kV
20 nm field stitching accuracy at 100kV
25 nm overlay accuracy at 100 kV

Status

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Tool Owners

Location

Cleanroom - Pettit

Capabilities

Radioactive - Radioactive

Shared Drive

Access Shared Drive

Schedule

Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

No similar equipment.

Standard Recipes and Reports

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User Shared Files

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Billing Rates

Academic Rate

$110/hr

Industry Rate

$300/hr

See our rates for more information.

Service Requests

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Equipment Log

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Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.

Cleanroom

The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100