This equipment requires radiation training
FEI Quanta 200 3D FIB/SEM
The Quanta 3D is designed to be a 3D-SEM. It combines traditional thermal emission Scanning Electron Microscopy (SEM) with Focused Ion Beam (FIB) to extend application ranges for 3D characterization and nanoanalysis. It allows charge-free imaging of a non-conductive specimen through its variable pressure vacuum system (ESEM) and gas chemistries for high-volume milling. Allows for:
-Crack tip 3D reconstruction
-Revealing sub-surface cause of surface defects on finished metal surfaces
-Characterization of strained materials along orthogonal sections
-Resolution of 3.5nm @ 30kV @ high vacuum
-5 axis motorized stage
-379 mm wide chamber
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Lab - Pettit 1st Floor
CapabilitiesRadioactive - Radioactive
Shared DriveAccess Shared Drive
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Standard Recipes and Reports
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Training SessionsTraining for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS) To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.