This equipment requires radiation training

FEI Quanta 200 3D FIB/SEM

Description

The Quanta 3D is designed to be a 3D-SEM. It combines traditional thermal emission Scanning Electron Microscopy (SEM) with Focused Ion Beam (FIB) to extend application ranges for 3D characterization and nanoanalysis. It allows charge-free imaging of a non-conductive specimen through its variable pressure vacuum system (ESEM) and gas chemistries for high-volume milling. Allows for:

-Crack tip 3D reconstruction
-Revealing sub-surface cause of surface defects on finished metal surfaces
-Characterization of strained materials along orthogonal sections
-Resolution of 3.5nm @ 30kV @ high vacuum
-5 axis motorized stage
-379 mm wide chamber
Go here for more info on the Quanta 200:
http://www.fib2center.chemistry.gatech.edu/index.html

Status

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Tool Owners

Location

Lab - Pettit 1st Floor

Capabilities

Radioactive - Radioactive

Shared Drive

Access Shared Drive

Schedule

Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

No similar equipment.

Standard Recipes and Reports

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User Shared Files

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Billing Rates

Academic Rate

$45/hr

Industry Rate

$135/hr

See our rates for more information.

Service Requests

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Equipment Log

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Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.

Cleanroom

The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100