Xactix Xenon Difluoride Etcher
This tool uses xenon difluoride gas sent through a showerhead to isotropically dry etch silicon, germanium, and molybdenum. It can process pieces up to 4" wafers and generates relatively rough isotropically etched features.
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Cleanroom - Marcus Inorganic
Shared DriveNo share drive for this equipment.
Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS) To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.
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Standard Recipes and Reports
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User Shared Files
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You are billed the cleanroom hourly rate when logged into this tool, even if you are not logged into a cleanroom.
See our rates for more information.
You must first log in to see service requests for the Xactix Xenon Difluoride Etcher.
You must first log in to see the equipment log for the Xactix Xenon Difluoride Etcher.
Training SessionsTraining for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS) To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.