Black Magic PECVD
AIXTRON’s PECVD system uses rapid heating and plasma technologies that have been proven in the field since 2005 and has enabled customers to produce various types of nanotubes, including low temperature multiwall, singlewall and supergrowth nanotubes for 4" substrates.
You must first log in to see the status.
Cleanroom - Marcus Inorganic
Shared DriveNo share drive for this equipment.
Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS) To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.
Equipment with Similar Capabilities
No similar equipment.
Standard Recipes and Reports
You must first log in to see the standard recipe files.
User Shared Files
You must first log in to see shared files.
You are billed the cleanroom hourly rate when logged into this tool, even if you are not logged into a cleanroom.
See our rates for more information.
You must first log in to see service requests for the Black Magic PECVD.
You must first log in to see the equipment log for the Black Magic PECVD.
Training SessionsTraining for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS) To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.