This equipment requires radiation training

CHA E-beam Evaporator 1 (dielectrics)

Description

The e-beam evaporator will provide very little coating to the sides of any features that are perpendicular to the surface of the substrate (anisotropic).

-Used to deposit dielectrics
-Low Process Pressure

Status

You must first log in to see the status.

Tool Owners

  • Charlie Suh

Location

Cleanroom - Marcus Inorganic

Capabilities

Deposition - Aluminum Oxide
Deposition - Dielectrics Deposition - Silicon Oxide
Deposition - Silicon
Deposition - Titanium Oxide
General Equipment Specification - Evaporator Systems
Radioactive - Radioactive

Shared Drive

No share drive for this equipment.

Schedule

Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

CHA E-beam Evaporator 2 (metals)

The e-beam evaporator will provide very little coating to the sides of any features that are perpendicular to the surface of the substrate.<br><br> -Used to deposit metal<br> -Low Process Pressure

Location

Cleanroom - Marcus Inorganic

CVC E-Beam Evaporator 1

The e-beam evaporator is used to coat samples with various metals. Unlike sputtered films, evaporators only coat the surface facing away from the substrate. <br> <br> -Typical deposition rates range from <1 A/sec to 3 A/sec.

Location

Cleanroom - Pettit

CVC E-Beam Evaporator 2 -- Instructional Center

The e-beam evaporator is used to coat samples with various metals. Unlike sputtered films, evaporators only coat the surface facing away from the substrate. -Typical deposition rates range from <1 angstroms/sec to 3 angstroms/sec.

Location

Cleanroom - Pettit

Denton Explorer - E-beam Evaporator

The Denton Explorer is a six pocket e-beam evaporator system used to coat samples with various metals and dielectrics. A high-intensity beam of electrons is focused on the center of a crucible containing the material to be evaporated. <br> <br> Features: <br> * Computer-controlled deposition<br> * Better than 3 x 10-6 Torr base pressure<br> * 0.5 - 5A/sec deposition rates<br> * Quartz crystal sensor deposition rate control<br> * 6-pocket source for Ti, Cr, Ni, Fe, Al, Cu, Pt, Au, SiO2, Al2O3

Location

Cleanroom - Marcus Inorganic

Denton Infinity

The Denton Infinity is a six pocket e-beam evaporator system used to coat samples with various metals. A high-intensity beam of electrons is focused on the center of a crucible containing the material to be evaporated. <br> <br> Features: <br> * Computer-controlled deposition<br> * Better than 3 x 10-6 Torr base pressure<br> * 0.5 - 5A/sec deposition rates<br> * Quartz crystal sensor deposition rate control<br> * 6-pocket source for Ti, Cr, Ni, NiFe, Cu, Fe<br> * A heater source capable of going up to 250C

Location

Cleanroom - Marcus Inorganic

PVD75 Filament Evaporator

The filament evaporator is used to coat samples with various metals. The PVD is a good choice for samples that need to be evaporator coated (to avoid coating the sides of rough topologies) but are sensitive to x-ray radiation from the E-beam. -Integrated touch screen control -Single substrate up to 12" diameter -Multiple substrate up to 4" diameter -Substrate fixture rotation up to 20 rpm Please note that it is possible to run gold on the system, however users need to bring their own gold pellets.

Location

Cleanroom - Marcus Inorganic

PVD Filament Evaporator (Instructional Lab)

PVD Filament Evaporator in the Pettit Instructional Lab

Location

Cleanroom - Pettit

Standard Recipes and Reports

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User Shared Files

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Billing Rates

You are billed the cleanroom hourly rate when logged into this tool, even if you are not logged into a cleanroom.

See our rates for more information.

Service Requests

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Equipment Log

You must first log in to see the equipment log for the CHA E-beam Evaporator 1 (dielectrics).

Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.

Cleanroom

The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100