JetFirst RTP

Description

The JetFirst RTP system is a rapid temperature processing system for up to 4" wafers. Specs: -ramp rate up to 70C/s -max allowable temp: 1100C -center thermocouple -outer edge (4" wafer) thermocouple for monitoring only -N2, O2, 10% forming gas (H2/N2) available -vacuum <1Torr

Status

You must first log in to see the status.

Tool Owners

  • John Pham

Location

Cleanroom - Marcus Inorganic

Capabilities

Thermal Processing - Diffusion

Shared Drive

No share drive for this equipment.

Schedule

Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

AET RTP

Rapid thermal processors (RTP) or rapid thermal annealers (RTA) are used to rapidly heat a sample for annealing. The RTP can heat a sample to 500 degrees C in as low as five seconds and can heat samples to 1100 degrees C in as little as 20 seconds.

Location

Cleanroom - Pettit

SSI RTP

The SSI RTP system is a rapid temperature processing system for up to 4" wafers. <br><br> Specs:<br><br> -max. allowable temp: 900C (contact staff for 901C-1100C)<br><br> -N2 / Air / O2 available<br><br> -10 SLM (10,000 sccm) range MFCs<br><br> -up to 80C/s ramp rate<br><br>

Location

Cleanroom - Marcus Inorganic

Standard Recipes and Reports

You must first log in to see the standard recipe files.

User Shared Files

You must first log in to see shared files.

Billing Rates

You are billed the cleanroom hourly rate when logged into this tool, even if you are not logged into a cleanroom.

See our rates for more information.

Service Requests

You must first log in to see service requests for the JetFirst RTP.

Equipment Log

You must first log in to see the equipment log for the JetFirst RTP.

Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.

Cleanroom

The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100