This equipment requires radiation training
Hitachi S-4700 FE-SEM
The Hitachi S-4700 FE-SEM is a cold field emission high resolution scanning electron microscope. This SEM permits ultra high resolution imaging of thin films and semi-conductor materials on exceptionally clean specimens.
You must first log in to see the status.
Cleanroom - Marcus Inorganic
CapabilitiesGeneral Equipment Specification - SEM Systems
Imaging - FESEM
Radioactive - Radioactive
Shared DriveAccess Shared Drive
Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS) To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.
Equipment with Similar Capabilities
The Zeiss scanning electron microscope is the instrument of choice for clear and precise imaging on large delicate specimems or uncoated wafers. The ULTRA 60 enables clear topographic imaging with the high efficiency In-lens SE detector. Ultra high resolution imaging at low kV Extra large 6-axes motorised fully eucentric stage with fine stage control Large sample throughput with integrated 8" airlock High efficiency In-lens SE detector for high contrast surface imaging download SmartTIFF: http://grover.mirc.gatech.edu/SmartTiffInstaller.exe to let you do measurements on your images
Marcus Microscopy 3
Standard Recipes and Reports
You must first log in to see the standard recipe files.
User Shared Files
You must first log in to see shared files.
You are billed the cleanroom hourly rate when logged into this tool, even if you are not logged into a cleanroom.
See our rates for more information.
You must first log in to see service requests for the Hitachi S-4700 FE-SEM.
You must first log in to see the equipment log for the Hitachi S-4700 FE-SEM.
Training SessionsTraining for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS) To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.