This equipment requires radiation training

Hitachi S-4700 FE-SEM

Description

The Hitachi S-4700 FE-SEM is a cold field emission high resolution scanning electron microscope. This SEM permits ultra high resolution imaging of thin films and semi-conductor materials on exceptionally clean specimens.

Status

You must first log in to see the status.

Tool Owners

Location

Cleanroom - Marcus Inorganic

Capabilities

General Equipment Specification - SEM Systems
Imaging - FESEM
Radioactive - Radioactive

Shared Drive

Access Shared Drive

Schedule

Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

Zeiss Ultra60 FE-SEM

The Zeiss scanning electron microscope is the instrument of choice for clear and precise imaging on large delicate specimems or uncoated wafers. The ULTRA 60 enables clear topographic imaging with the high efficiency In-lens SE detector. Ultra high resolution imaging at low kV Extra large 6-axes motorised fully eucentric stage with fine stage control Large sample throughput with integrated 8" airlock High efficiency In-lens SE detector for high contrast surface imaging download SmartTIFF: http://grover.mirc.gatech.edu/SmartTiffInstaller.exe to let you do measurements on your images

Location

Marcus Microscopy 3

Standard Recipes and Reports

You must first log in to see the standard recipe files.

User Shared Files

You must first log in to see shared files.

Billing Rates

You are billed the cleanroom hourly rate when logged into this tool, even if you are not logged into a cleanroom.

See our rates for more information.

Service Requests

You must first log in to see service requests for the Hitachi S-4700 FE-SEM.

Equipment Log

You must first log in to see the equipment log for the Hitachi S-4700 FE-SEM.

Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.

Cleanroom

The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100