IONTOF Time-of-Flight SIMS


The ToF-SIMS system uses Bi ions to directly chemically image surfaces. Sputtering by O or Cs ion beams allows depth profiles up to ~ 1 micron. Atomic masses from 1 up to >5000 amu (i.e. H up to large molecules) can be detected with a high mass resolution. The system can detect trace elements down to concentrations of a few parts per million. The software can produce 2-D and 3 -D chemical reconstructions of analyzed areas. Lateral resolution is as small as ~300 nm, vertical resolution is ~ 2nm.


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Tool Owners


Marcus Microscopy 1


General Equipment Specification - Characterization
Metrology - Surface Properties

Shared Drive

Access Shared Drive


Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities


Marcus Microscopy 2

Thermo K-Alpha XPS

X-ray Photoelectron Spectroscopy (XPS) is an analytical technique that directs a monochromatic beam of x-rays onto a sample and detects the characteristic electrons that are ejected. The energies and number of these electrons can be used to determine not only the elements present on the sample surface, but their abundance and chemical bonding state as well. Elements from Li to U can be detected. The technique is highly surface sensitive – the typical detection depth is ~5 nm – and can detect light elements such as Si (Z =14) and below at about 1% of the total surface composition and heavier elements down to ~0.1 % with an accuracy of 20 – 50 percent of the given value.


Marcus Microscopy 2

Standard Recipes and Reports

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User Shared Files

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Billing Rates

Academic Rate


Industry Rate


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Service Requests

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Equipment Log

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Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.


The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100