IONTOF Time-of-Flight SIMS
The ToF-SIMS system uses Bi ions to directly chemically image surfaces. Sputtering by O or Cs ion beams allows depth profiles up to ~ 1 micron. Atomic masses from 1 up to >5000 amu (i.e. H up to large molecules) can be detected with a high mass resolution. The system can detect trace elements down to concentrations of a few parts per million. The software can produce 2-D and 3 -D chemical reconstructions of analyzed areas. Lateral resolution is as small as ~300 nm, vertical resolution is ~ 2nm.
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Marcus Microscopy 1
CapabilitiesGeneral Equipment Specification - Characterization
Metrology - Surface Properties
Shared DriveAccess Shared Drive
Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS) To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.
Equipment with Similar Capabilities
Marcus Microscopy 2
X-ray Photoelectron Spectroscopy (XPS) is an analytical technique that directs a monochromatic beam of x-rays onto a sample and detects the characteristic electrons that are ejected. The energies and number of these electrons can be used to determine not only the elements present on the sample surface, but their abundance and chemical bonding state as well. Elements from Li to U can be detected. The technique is highly surface sensitive – the typical detection depth is ~5 nm – and can detect light elements such as Si (Z =14) and below at about 1% of the total surface composition and heavier elements down to ~0.1 % with an accuracy of 20 – 50 percent of the given value.
Marcus Microscopy 2
Standard Recipes and Reports
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User Shared Files
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See our rates for more information.
You must first log in to see service requests for the IONTOF Time-of-Flight SIMS.
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Training SessionsTraining for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS) To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.