Instructions

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  1. Check:

    MODE is set to DC PLATE

    Do not switch between modes at all (only "plate" is allowed)

    VOLTS is at 1800 (red arrow).

  2. Open chamber lid carefully to place sample on stage
  3. Replace lid.
  4. Turn power ON and place slight pressure on lid to start vacuum seal
  5. Press VAC button to start the vacuum process.
  6. Once pressure hits 100 mTorr, VAC light will switch on
  7. Press GAS button to flow argon into chamber
  8. Press HV button to ignite plasma and start sputtering process.
    You will see the pressure rise after the plasma ignites (pink-purple glow).

    This is normal

    If plasma flickering develops, check pressure and current
  9. Run sputtering process until deposition is ~10 nm (about 300 seconds).
    Current should be ~10 mA.
  10. Once process is complete, turn off GAS and HV.
  11. Press STOP to turn off pump.
  12. Press and hold PURGE button in order to vent chamber with N2.
  13. Once chamber is fully vented, turn power OFF.
  14. Open chamber to retrieve sample.
  15. Replace Lid.
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