EVG 101 Spin Coater

Description

The EVG101 Spin Coater is a teflon body, automatic Shipley 1827 resist spin coater. It offers further functionality allowing users to cast photoresist through a syringe pump or manually. The spin coater is also self-cleaning and can be configured for edge bead rinse and backside rinse.

Status

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Tool Owners

Location

Cleanroom - Marcus Inorganic

Capabilities

None listed.

Shared Drive

No share drive for this equipment.

Schedule

Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

No similar equipment.

Standard Recipes and Reports

You must first log in to see the standard recipe files.

User Shared Files

You must first log in to see shared files.

Billing Rates

There are no hourly rates for this equipment. You will only be charged for cleanroom time.

See our rates for more information.

Service Requests

You must first log in to see service requests for the EVG 101 Spin Coater.

Equipment Log

You must first log in to see the equipment log for the EVG 101 Spin Coater.

Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.

Cleanroom

The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100