Microtech Laserwriter LW405
The LaserWriter system by MICROTECH is designed for the definition of planar geometries and for surface diagnostics, in applications where maximum resolutions down to 0.7 µm are required. The system transforms a laser beam into a controlled writing tool for photolithographic mask fabrication or for direct in situ processing on planar substrates. Besides microlithographic applications, its optical apparatus and substrate motion management are also well suited for surface inspection or diagnostics. Hence, the same machine can be used first for producing a pattern and later for inspecting the results. The patterns are generated by accurately moving the target (mask or substrate) underneath a focused and scanning laser beam with proper wavelength. The performance and cost of the system are optimised for research and development or small/medium productions. http://www.microtechweb.com/2d/lw_specs.htm
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Cleanroom - Marcus Inorganic
CapabilitiesLithography - Pattern Generation
Shared DriveNo share drive for this equipment.
Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS) To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.
Equipment with Similar Capabilities
The 3600F is a laser interferometer metered pattern generator for the generation of patterns on Chrome mask blanks. A vacuum plateholder accommodates 2-inch through 7-inch plates with a standard mask thickness of 0.090 inch.
Standard Recipes and Reports
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User Shared Files
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There are no hourly rates for this equipment. You will only be charged for cleanroom time.
See our rates for more information.
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Training SessionsTraining for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS) To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.