Sulfurization furnace


The sulfurization furnace is used to deposit sulfur at high temperatures. The tool is setup to inject sulfur into the chamber then allow the sulfur to soak, covering all substrates. There is a turbo pump installed on the system to allow for low base and process pressure and good process control. The maximum temperature is 1050 C with a max ramp rate of 120 C/min. Gases available are argon, hydrogen, and methane.


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Tool Owners

  • Claude Roney


Cleanroom - Marcus Inorganic


Thermal Processing - Film Growth
Thermal Processing - Materials Growth

Shared Drive

No share drive for this equipment.


Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

No similar equipment.

Standard Recipes and Reports

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User Shared Files

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Billing Rates

There are no hourly rates for this equipment. You will only be charged for cleanroom time.

See our rates for more information.

Service Requests

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Equipment Log

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Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.


The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100