CVD FirstNano Graphene Furnace 2
The CVD FirstNano Graphene 2 is currently configured to grow graphene on Cu foil samples. Samples are heated via infrared lamps from top and bottom. A turbo pump and load-lock allows for low base pressure and thus low back-ground O2 contamination.
4" wafer and small pieces
SiH4, H2, Ar, NH3
Base pressure 1e-7 Torr
(keywords: growth materials copper)
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- Claude Roney
Cleanroom - Marcus Inorganic
CapabilitiesGeneral Equipment Specification - Graphene/SiGe Systems
Shared DriveNo share drive for this equipment.
Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS) To schedule time on equipment within SUMS browse to https://sums.gatech.edu/Department/IEN log in, search for equipment, and click & drag to schedule time.
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Standard Recipes and Reports
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User Shared Files
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There are no hourly rates for this equipment. You will only be charged for cleanroom time.
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Training SessionsTraining for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS) To get trained for the Cleanrooms, or equipment within the IEN department simply browse to http://sums.gatech.edu/Department/IEN Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.