Veeco AFM


The Dimension 3100 Scanning Probe Microscope (SPM) utilizes automated atomic force microscopy (AFM) and scanning tunneling microscopy (STM) techniques to measure surface characteristics for semiconductor wafers and other samples up to 200 mm in diameter.


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Tool Owners


Marcus Microscopy 4


General Equipment Specification - Characterization
Metrology - Imaging
Metrology - Surface Properties

Shared Drive

Access Shared Drive


Equipment access control, scheduling, and training is now managed within the Shared User Management System (SUMS)
To schedule time on equipment within SUMS browse to log in, search for equipment, and click & drag to schedule time.

Equipment with Similar Capabilities

Veeco AFM II Dimension 3100

Veeco AFM 2 in Pettit 161


Marcus Microscopy 2

Standard Recipes and Reports

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User Shared Files

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Billing Rates

Academic Rate


Industry Rate


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Service Requests

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Equipment Log

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Training Sessions

Training for the IEN Cleanrooms is now managed within the Shared User Management System. (SUMS)
To get trained for the Cleanrooms, or equipment within the IEN department simply browse to
Log in with your Georgia Tech username and password, then browse to the IEN Equipment Group page to learn new training info.


The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100