Equipment

on this page

ALD

Dielectrics Deposition - Alumina

ALD2 (Cleanroom - Marcus Inorganic)
Cambridge NanoTech Plasma ALD - Metal (left) (Cleanroom - Marcus Inorganic)
Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Dielectrics Deposition - Erbium Oxide

ALD2 (Cleanroom - Marcus Inorganic)

Dielectrics Deposition - Hafnia

ALD2 (Cleanroom - Marcus Inorganic)
Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Dielectrics Deposition - Silica

Schmid APCVD (Cleanroom - Marcus Inorganic)
Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Dielectrics Deposition - Titania

Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Dielectrics Deposition - Zinc Oxide

Cambridge NanoTech Plasma ALD - Metal (left) (Cleanroom - Marcus Inorganic)

Dielectrics Deposition - Zirconia

Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Metal Deposition - Platinum

Cambridge NanoTech Plasma ALD - Metal (left) (Cleanroom - Marcus Inorganic)

Nitride Deposition - Aluminum Nitride

Cambridge NanoTech Plasma ALD - Metal (left) (Cleanroom - Marcus Inorganic)
Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Nitride Deposition - Hafnium Nitride

Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Nitride Deposition - Silicon Nitride

Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Nitride Deposition - Titanium Nitride

Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Nitride Deposition - Zirconium Nitride

Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Deposition

Aluminum Oxide

CHA E-beam Evaporator 1 (dielectrics) (Cleanroom - Marcus Inorganic)
Schmid APCVD (Cleanroom - Marcus Inorganic)

Biological

Bioforce Nano eNabler Printer/Patterner (Cleanroom - Marcus Organic)
JetLabII Ink-jet Printer (Cleanroom - Marcus Organic)

Deposition - Carbon

Cressington 108A Carbon Coater (Marcus Microscopy 1)

Dielectrics Deposition - Diamond Like Carbon

Dielectrics Deposition - RF Sputterer Dielectrics

PVD75 RF Sputterer (Cleanroom - Marcus Inorganic)

Dielectrics Deposition - Silicon Carbide

Dielectrics Deposition - Silicon Nitride

Oxford ICP PECVD (Cleanroom - Marcus Inorganic)
Oxford PECVD right (Cleanroom - Marcus Inorganic)
STS PECVD (Cleanroom - Pettit)
STS PECVD 2 (Cleanroom - Pettit)
STS PECVD 3 (Cleanroom - Marcus Inorganic)
Tystar Nitride Furnace 4 (Cleanroom - Pettit)
Unaxis PECVD (Cleanroom - Pettit)

Dielectrics Deposition - Silicon Oxide

CHA E-beam Evaporator 1 (dielectrics) (Cleanroom - Marcus Inorganic)
Mini Tystar Tube 1 (Cleanroom - Marcus Inorganic)
Mini Tystar Tube 2 (Cleanroom - Marcus Inorganic)
MRL Furnace - Tube 3 (Cleanroom - Marcus Inorganic)
Oxford ICP PECVD (Cleanroom - Marcus Inorganic)
Oxford PECVD right (Cleanroom - Marcus Inorganic)
STS PECVD (Cleanroom - Pettit)
STS PECVD 2 (Cleanroom - Pettit)
STS PECVD 3 (Cleanroom - Marcus Inorganic)
Unaxis PECVD (Cleanroom - Pettit)

Indium Oxide

Metal Deposition - Aluminum

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
PVD75 Filament Evaporator (Cleanroom - Marcus Inorganic)
PVD75 RF Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Chromium

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
Denton Infinity (Cleanroom - Marcus Inorganic)
PVD75 Filament Evaporator (Cleanroom - Marcus Inorganic)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Copper

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
Denton Infinity (Cleanroom - Marcus Inorganic)
PVD75 Filament Evaporator (Cleanroom - Marcus Inorganic)
PVD75 RF Sputterer (Cleanroom - Marcus Inorganic)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Gold

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
PVD75 Filament Evaporator (Cleanroom - Marcus Inorganic)
PVD75 RF Sputterer (Cleanroom - Marcus Inorganic)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Indium

Metal Deposition - Iron

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
PVD75 RF Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Nickel

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
PVD75 RF Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Palladium

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)

Metal Deposition - Platinum

CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
PVD75 RF Sputterer (Cleanroom - Marcus Inorganic)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Ruthenium

CVC DC Sputterer (Cleanroom - Pettit)

Metal Deposition - Silver

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)

Metal Deposition - Tanatalum

CVC DC Sputterer (Cleanroom - Pettit)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Tin

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)

Metal Deposition - Titanium

CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC DC Sputterer (Cleanroom - Pettit)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
Denton Infinity (Cleanroom - Marcus Inorganic)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Metal Deposition - Tungsten

CVC DC Sputterer (Cleanroom - Pettit)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Poymer

Bioforce Nano eNabler Printer/Patterner (Cleanroom - Marcus Organic)
JetLabII Ink-jet Printer (Cleanroom - Marcus Organic)

Silicon

CHA E-beam Evaporator 1 (dielectrics) (Cleanroom - Marcus Inorganic)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Thin Films

Titanium Oxide

CHA E-beam Evaporator 1 (dielectrics) (Cleanroom - Marcus Inorganic)

Zinc Oxide

Etch

Copper

Oxford Cryogenic ICP (Cleanroom - Marcus Inorganic)

Dielectrics - Gallium Nitride

PlasmaTherm ICP (Cleanroom - Pettit)
STS SOE ICP (Cleanroom - Pettit)

Dielectrics - Indium Phosphide

Plasma-Therm RIE (Cleanroom - Pettit)
STS SOE ICP (Cleanroom - Pettit)

Dielectrics - Silicon Nitride

Oxford End-point RIE (Cleanroom - Marcus Inorganic)
PlasmaTherm ICP (Cleanroom - Pettit)
Plasma-Therm RIE (Cleanroom - Pettit)
STS AOE ICP (Cleanroom - Pettit)
Vision RIE 1 (Cleanroom - Pettit)
Vision RIE 2 (Cleanroom - Marcus Inorganic)

Dielectrics - Silicon Oxide

Hydrofluoric (HF) Vapor Etcher (Cleanroom - Marcus Inorganic)
Oxford Cryogenic ICP (Cleanroom - Marcus Inorganic)
Oxford End-point RIE (Cleanroom - Marcus Inorganic)
PlasmaTherm ICP (Cleanroom - Pettit)
Plasma-Therm RIE (Cleanroom - Pettit)
STS AOE ICP (Cleanroom - Pettit)
STS SOE ICP (Cleanroom - Pettit)
Vision RIE 1 (Cleanroom - Pettit)
Vision RIE 2 (Cleanroom - Marcus Inorganic)

Dielectrics - Zinc Sulfide

Plasma-Therm RIE (Cleanroom - Pettit)

Etch - Quartz

Metals - Aluminum

Plasma-Therm RIE (Cleanroom - Pettit)

Metals - Chrome

PlasmaTherm ICP (Cleanroom - Pettit)
Plasma-Therm RIE (Cleanroom - Pettit)

Polymer - Photoresist

Gasonics Asher (Inorganic) (Cleanroom - Marcus Inorganic)
Plasma-Therm RIE (Cleanroom - Pettit)

Polymer - Polyimide

Plasma-Therm RIE (Cleanroom - Pettit)

Quartz

STS AOE ICP (Cleanroom - Pettit)

Semiconductor

Plasma-Therm RIE (Cleanroom - Pettit)

Silicon

PlasmaTherm ICP (Cleanroom - Pettit)
Plasma-Therm RIE (Cleanroom - Pettit)
STS AOE ICP (Cleanroom - Pettit)
STS HRM ICP (Cleanroom - Marcus Inorganic)
STS ICP (Cleanroom - Pettit)
STS Pegasus ICP (Cleanroom - Pettit)

General Equipment Specification

ALD Systems

ALD2 (Cleanroom - Marcus Inorganic)
Cambridge NanoTech Plasma ALD - Metal (left) (Cleanroom - Marcus Inorganic)
Cambridge NanoTech Plasma ALD - Oxide (right) (Cleanroom - Marcus Inorganic)

Characterization

FEI Nova Nanolab 200 FIB/SEM (Marcus Microscopy 1)
Hitachi HT7700 TEM (Marcus Microscopy 1)
Hitachi SU8230 (Marcus Microscopy 4)
Hitachi ZoneSEM (Marcus Microscopy 4)
Hysitron TriboIndenter (Marcus Microscopy 4)
IONTOF Time-of-Flight SIMS (Marcus Microscopy 1)
Keyence VHX-600 Digital Microscope (Marcus Microscopy 2)
Kratos XPS (Marcus Microscopy 2)
Thermo K-Alpha XPS (Marcus Microscopy 2)
Veeco AFM (Marcus Microscopy 4)
Veeco AFM II Dimension 3100 (Marcus Microscopy 2)
Zeiss Ultra60 FE-SEM (Marcus Microscopy 3)

Evaporator Systems

CHA E-beam Evaporator 1 (dielectrics) (Cleanroom - Marcus Inorganic)
CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
Denton Infinity (Cleanroom - Marcus Inorganic)
PVD75 Filament Evaporator (Cleanroom - Marcus Inorganic)

Graphene/SiGe Systems

CVD FirstNano Graphene Furnace 1 (Cleanroom - Marcus Inorganic)
CVD FirstNano Graphene Furnace 2 (Cleanroom - Marcus Inorganic)
CVD FirstNano SiGe Nanowire Furnace (Cleanroom - Marcus Inorganic)

ICP Systems

Oxford Cryogenic ICP (Cleanroom - Marcus Inorganic)
PlasmaTherm ICP (Cleanroom - Pettit)
STS AOE ICP (Cleanroom - Pettit)
STS HRM ICP (Cleanroom - Marcus Inorganic)
STS ICP (Cleanroom - Pettit)
STS Pegasus ICP (Cleanroom - Pettit)
STS SOE ICP (Cleanroom - Pettit)

Mask Aligner Systems

EVG 620 Mask Aligner (Cleanroom - Marcus Inorganic)
Karl Suss MA-6 Mask Aligner - Inorganic (Cleanroom - Marcus Inorganic)
Karl Suss MA-6 Mask Aligner - Pettit (Cleanroom - Pettit)
Karl Suss TSA MA-6 Mask Aligner (Cleanroom - Marcus Inorganic)

PECVD Systems

Oxford ICP PECVD (Cleanroom - Marcus Inorganic)
Oxford PECVD right (Cleanroom - Marcus Inorganic)
Plasma-Therm PECVD (Cleanroom - Pettit)
STS PECVD (Cleanroom - Pettit)
STS PECVD 2 (Cleanroom - Pettit)
STS PECVD 3 (Cleanroom - Marcus Inorganic)
Unaxis PECVD (Cleanroom - Pettit)

RIE Systems

Oxford End-point RIE (Cleanroom - Marcus Inorganic)
Plasma-Therm RIE (Cleanroom - Pettit)
Plasma-Therm SLR RIE (Cleanroom - Pettit)
Unaxis RIE (Cleanroom - Marcus Inorganic)
Vision RIE 1 (Cleanroom - Pettit)
Vision RIE 2 (Cleanroom - Marcus Inorganic)

SEM Systems

Hitachi HT7700 TEM (Marcus Microscopy 1)
Hitachi S-3700N VP-SEM (Cleanroom - Marcus Organic)
Hitachi S-4700 FE-SEM (Cleanroom - Marcus Inorganic)
LEO 1530 FE-SEM (Cleanroom - Pettit)

Specialty Bonder/Spray Coater Systems

Karl Suss SB6 Bonder (Cleanroom - Marcus Inorganic)
Karl Suss SB8E Bonder (Cleanroom - Marcus Inorganic)
Suss AltaSpray Spray Coater (Cleanroom - Marcus Inorganic)

Sputterer Systems

CVC DC Sputterer (Cleanroom - Pettit)
PVD75 RF Sputterer (Cleanroom - Marcus Inorganic)
Unifilm Sputterer (Cleanroom - Marcus Inorganic)

Tystar Furnace Systems

Lindberg Furnace 1 (CMOS Sintering Tube) (Cleanroom - Pettit)
Lindberg Furnace 2 (Polymer Curing Tube) (Cleanroom - Pettit)
Lindberg Furnace 3 (Oxidation Tube) (Cleanroom - Pettit)
Lindberg Furnace 4 (Polymer Curing Tube) (Cleanroom - Pettit)
Mini Tystar Tube 1 (Cleanroom - Marcus Inorganic)
Mini Tystar Tube 2 (Cleanroom - Marcus Inorganic)
MRL Furnace - Tube 3 (Cleanroom - Marcus Inorganic)
MRL Furnace - Tube 4 (Cleanroom - Marcus Inorganic)
Tystar Nitride Furnace 1 (Cleanroom - Pettit)
Tystar Nitride Furnace 2 (Cleanroom - Pettit)
Tystar Nitride Furnace 3 (Cleanroom - Pettit)
Tystar Nitride Furnace 4 (Cleanroom - Pettit)
Tystar Poly Furnace 1 (Cleanroom - Pettit)
Tystar Poly Furnace 2 (Cleanroom - Pettit)

XPS Systems

General Equipment Specification (old)

Substrate Size - 2 in wafer

Plasma-Therm RIE (Cleanroom - Pettit)

Substrate Size - small pieces

Imaging

FESEM

Hitachi S-4700 FE-SEM (Cleanroom - Marcus Inorganic)
LEO 1530 FE-SEM (Cleanroom - Pettit)
Zeiss Ultra60 FE-SEM (Marcus Microscopy 3)

Lithography

E-Beam Nanolitography

Mask Alignment

EVG 620 Mask Aligner (Cleanroom - Marcus Inorganic)
Karl Suss TSA MA-6 Mask Aligner (Cleanroom - Marcus Inorganic)
Soft-Lithography Training (Cleanroom - Marcus Organic)

Pattern Generation

Microtech Laserwriter LW405 (Cleanroom - Marcus Inorganic)

Spin Coating

BLE Spinner (Cleanroom - Marcus Inorganic)
Karl Suss RC8 Spinner - Inorganic (Cleanroom - Marcus Inorganic)
SCS G3P8 Spin Coater 1 (small pieces) (Cleanroom - Marcus Inorganic)
SCS G3P8 Spin Coater 2 - Pettit (Cleanroom - Pettit)
SCS G3P8 Spin Coater 3 - Inorganic (Cleanroom - Marcus Inorganic)
SCS G3P8 Spin Coater - Instructional Center (Cleanroom - Pettit)
Soft-Lithography Training (Cleanroom - Marcus Organic)

Metrology

Film Thickness

Nanospec Reflectometer - Inorganic (Cleanroom - Marcus Inorganic)
Nanospec Reflectometer - Pettit (Cleanroom - Pettit)
Q-sense QCM-D (Cleanroom - Marcus Organic)
Woollam Ellipsometer (Cleanroom - Pettit)

Film Uniformity

Woollam Ellipsometer (Cleanroom - Pettit)
Wyko Profilometer NT3300 (Cleanroom - Marcus Inorganic)

Imaging

Veeco AFM (Marcus Microscopy 4)
Wyko Profilometer NT3300 (Cleanroom - Marcus Inorganic)
Zeiss Ultra60 FE-SEM (Marcus Microscopy 3)

Optical Properties

Woollam Ellipsometer (Cleanroom - Pettit)

Particle Size

Malvern Zetasizer (Cleanroom - Marcus Organic)

Surface Properties

Contact Angle Measurement System (Cleanroom - Marcus Organic)
Hysitron TriboIndenter (Marcus Microscopy 4)
IONTOF Time-of-Flight SIMS (Marcus Microscopy 1)
Q-sense QCM-D (Cleanroom - Marcus Organic)
SemiTest SCA-2500 Surface Charge Analyzer (Cleanroom - Pettit)
Thermo K-Alpha XPS (Marcus Microscopy 2)
Veeco AFM (Marcus Microscopy 4)

Zeta Potential

Malvern Zetasizer (Cleanroom - Marcus Organic)

Packaging

Backend

Abrasive Blast Cabinet (Assembly Lab)
BGA Rework Station (Assembly Lab)
Dage Shear Tester (Assembly Lab)
K&S 4522 Ball Bonder (Assembly Lab)
K&S Manual Wire Bonder Pettit 160 (Lab - Pettit 160)
Manual Flip Chip Bonder (Assembly Lab)
Peel Tester (Assembly Lab)
Quick Circuit 7000 PCB Milling Machine (Assembly Lab)
Semiautomatic Screen Printer (Assembly Lab)

Radioactive

Radioactive

CHA E-beam Evaporator 1 (dielectrics) (Cleanroom - Marcus Inorganic)
CHA E-beam Evaporator 2 (metals) (Cleanroom - Marcus Inorganic)
CVC E-Beam Evaporator 1 (Cleanroom - Pettit)
CVC E-Beam Evaporator 2 -- Instructional Center (Cleanroom - Pettit)
Dage X-Ray XD7600NT (Lab - Pettit 160)
Denton Explorer - E-beam Evaporator (Cleanroom - Marcus Inorganic)
FEI Nova Nanolab 200 FIB/SEM (Marcus Microscopy 1)
FEI Quanta 200 3D FIB/SEM (Lab - Pettit 1st Floor)
Hitachi HT7700 TEM (Marcus Microscopy 1)
Hitachi S-3500H SEM (Lab - Pettit 160)
Hitachi S-3700N VP-SEM (Cleanroom - Marcus Organic)
Hitachi S-4700 FE-SEM (Cleanroom - Marcus Inorganic)
Hitachi SU8230 (Marcus Microscopy 4)
JEOL JBX-9300FS EBL System (Cleanroom - Pettit)
Kratos XPS (Marcus Microscopy 2)
LEO 1530 FE-SEM (Cleanroom - Pettit)
Thermo K-Alpha XPS (Marcus Microscopy 2)
Zeiss Ultra60 FE-SEM (Marcus Microscopy 3)

Thermal Processing

Diffusion

MRL Furnace - Tube 4 (Cleanroom - Marcus Inorganic)
SSI RTP (Cleanroom - Marcus Inorganic)
Tystar Nitride Furnace 1 (Cleanroom - Pettit)
Tystar Nitride Furnace 2 (Cleanroom - Pettit)
Tystar Nitride Furnace 3 (Cleanroom - Pettit)
Tystar Nitride Furnace 4 (Cleanroom - Pettit)
Tystar Poly Furnace 1 (Cleanroom - Pettit)
Tystar Poly Furnace 2 (Cleanroom - Pettit)

Film Growth

Lindberg Furnace 1 (CMOS Sintering Tube) (Cleanroom - Pettit)
Lindberg Furnace 2 (Polymer Curing Tube) (Cleanroom - Pettit)
Lindberg Furnace 3 (Oxidation Tube) (Cleanroom - Pettit)
Lindberg Furnace 4 (Polymer Curing Tube) (Cleanroom - Pettit)
Mini Tystar Tube 1 (Cleanroom - Marcus Inorganic)
Mini Tystar Tube 2 (Cleanroom - Marcus Inorganic)
MRL Furnace - Tube 3 (Cleanroom - Marcus Inorganic)
Schmid APCVD (Cleanroom - Marcus Inorganic)
Sulfurization furnace (Cleanroom - Marcus Inorganic)
Tystar Nitride Furnace 1 (Cleanroom - Pettit)
Tystar Nitride Furnace 2 (Cleanroom - Pettit)
Tystar Nitride Furnace 3 (Cleanroom - Pettit)
Tystar Nitride Furnace 4 (Cleanroom - Pettit)
Tystar Poly Furnace 1 (Cleanroom - Pettit)
Tystar Poly Furnace 2 (Cleanroom - Pettit)

Materials Growth

Schmid APCVD (Cleanroom - Marcus Inorganic)
Sulfurization furnace (Cleanroom - Marcus Inorganic)

Wet Bench Processing

Wet Processing

CMOS Cleaning Station (Marcus) (Cleanroom - Marcus Inorganic)
CMOS Cleaning Station (Pettit) (Cleanroom - Pettit)
CMOS Spin Rinse Dryer (Inorganic) (Cleanroom - Marcus Inorganic)
CMOS Spin Rinse Dryer - Pettit (Cleanroom - Pettit)
MEMS Wet Bench (Cleanroom - Pettit)
Semitool Spin Rinse Dryer -- Instructional Center (Cleanroom - Pettit)
Soft-Lithography Training (Cleanroom - Marcus Organic)
Verteq Spin Rinse Dryer -- Instructional Center (Cleanroom - Pettit)

Cleanroom

The IEN has cleanrooms in the Pettit Microelectronics Research building and the Marcus Nanotechnology Research building. Learn More

Georgia Tech Institute for Electronics and Nanotechnology

The Institute for Electronics and Nanotechnology (IEN) is a Georgia Tech interdisciplinary research institute designed to enhance support for rapidly growing research programs spanning biomedicine, materials, electronics and nanotechnology. Learn More

Visit Georgia Tech IEN

Marcus Nanotechnology Research Center
Georgia Institute of Technology
345 Ferst Drive NW
Atlanta, GA 30318
(404) 894-5100
Pettit Microelectronics Research Building
Georgia Institute of Technology
791 Atlantic Drive
Atlanta, Ga 30332
(404) 894-5100