Our Rates

Updated: 01/29/2015

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Direct Costs

This is what we directly charge you, not including any overhead rates charged by the university.
If the source of funds is a sponsored agreement, overhead (indirect costs) will be charged at rates ranging from 57.4% to 61.8% in FY16. In general, overhead will be charged on all external user transactions.

Cleanroom Rates

Rates for being inside a cleanroom.

US Academic Rate1
(Direct Cost)
Foreign Academic/Industry Rate
(Direct Cost)
Pettit and Marcus Inorganic Cleanroom Entry Fee (includes Organic entry fee) $200 per month $550 per month
Marcus Organic Cleanroom Only Entry Fee (not charged if user enters Pettit or Marucs Inorganic Cleanroom in same month) $0 per month $0 per month
Hourly Fee for All Cleanrooms $20 per hour (120 cap per quarter) $20 per hour (no cap)

Hourly Equipment

This equipment is billed hourly as listed below. Except for the JEOL JBX-9300FS EBL, the below-listed tools are outside of the cleanroom, and only the hourly rates will be charged. (Note: The JEOL is inside of the Pettit cleanroom, and on site users of the JEOL will be charged cleanroom entry and hourly usage fees as well as tool time.)

Equipment US Academic Rate1
(Direct Cost)
Foreign Academic/Industry Rate
(Direct Cost)
Dage X-Ray XD7600NT (Lab - Pettit 160) $20/hr $36/hr
FEI Nova Nanolab 200 FIB/SEM (Marcus Microscopy 1) $45/hr $135/hr
FEI Quanta 200 3D FIB/SEM (Lab - Pettit 1st Floor) $45/hr $135/hr
Finetech Sub-micron Flip-chip Bonder (Lab - Pettit 160) $20/hr $35/hr
Hermes LS500XL CO2 laser (Lab - Pettit 161) $20/hr $20/hr
Hitachi HT7700 TEM (Marcus Microscopy 1) $40/hr $100/hr
Hitachi S-3500H SEM (Lab - Pettit 160) $20/hr $20/hr
Hitachi SU8230 (Marcus Microscopy 4) $35/hr $100/hr
Hummer 6 Gold/Palladium Sputterer (Marcus Microscopy 1) $20/hr $30/hr
Hysitron TriboIndenter (Marcus Microscopy 4) $20/hr $50/hr
IONTOF Time-of-Flight SIMS (Marcus Microscopy 1) $45/hr $150/hr
JEOL JBX-9300FS EBL System (Cleanroom - Pettit) $110/hr $300/hr
Keyence VHX-600 Digital Microscope (Marcus Microscopy 2) $20/hr $39/hr
Kratos XPS (Marcus Microscopy 2) $35/hr $70/hr
Logitech LP50 Lapper (Lab - Marcus Lapper & Polishing Room) $5/hr $10/hr
Logitech PM5 Polisher 1 (Lab - Marcus Lapper & Polishing Room) $5/hr $10/hr
Raman Spectrometer (Marcus Microscopy 4) $20/hr $40/hr
Resonetics IR laser (Lab - Pettit 161) $20/hr $20/hr
SCS Parylene Coater (Lab - Pettit 160) $20/hr $40/hr
Thermo K-Alpha XPS (Marcus Microscopy 2) $35/hr $70/hr
Veeco AFM (Marcus Microscopy 4) $20/hr $40/hr
Veeco AFM II Dimension 3100 (Marcus Microscopy 2) $20/hr $40/hr
Zeiss Ultra60 FE-SEM (Marcus Microscopy 3) $35/hr $100/hr

Equipment Always Billed

For the tools listed below, you will always be charged the cleanroom hourly rate when you are logged into the tool, even if you are not logged into a cleanroom. And remember, you will only be charged the cleanroom rate for one tool, even if you are logged into multiple tools.

Equipment Location
ALD1 Cleanroom - Marcus Inorganic
ALD2 Cleanroom - Marcus Inorganic
Biacore T200 SPR Cleanroom - Marcus Organic
Bioforce Nano eNabler Printer/Patterner Cleanroom - Marcus Organic
Black Magic PECVD Cleanroom - Marcus Inorganic
Cambridge NanoTech Plasma ALD - Metal (left) Cleanroom - Marcus Inorganic
Cambridge NanoTech Plasma ALD - Oxide (right) Cleanroom - Marcus Inorganic
CHA E-beam Evaporator 1 (dielectrics) Cleanroom - Marcus Inorganic
CHA E-beam Evaporator 2 (metals) Cleanroom - Marcus Inorganic
Contact Angle Measurement System Cleanroom - Marcus Organic
CVC DC Sputterer Cleanroom - Pettit
CVC E-Beam Evaporator 1 Cleanroom - Pettit
CVC E-Beam Evaporator 2 -- Instructional Center Cleanroom - Pettit
CVD FirstNano SiGe Nanowire Furnace Cleanroom - Marcus Inorganic
Denton Discovery - RF/DC Sputterer Cleanroom - Marcus Inorganic
Denton Explorer - E-beam Evaporator Cleanroom - Marcus Inorganic
Gasonics Asher Cleanroom - Pettit
Hitachi S-3700N VP-SEM Cleanroom - Marcus Organic
Hitachi S-4700 FE-SEM Cleanroom - Marcus Inorganic
Hummer 5 Gold/Palladium Sputterer Cleanroom - Pettit
JetLabII Ink-jet Printer Cleanroom - Marcus Organic
Karl Suss SB6 Bonder Cleanroom - Marcus Inorganic
LEO 1530 FE-SEM Cleanroom - Pettit
Lindberg Furnace 1 (CMOS Sintering Tube) Cleanroom - Pettit
Lindberg Furnace 2 (Polymer Curing Tube) Cleanroom - Pettit
Lindberg Furnace 3 (Oxidation Tube) Cleanroom - Pettit
Lindberg Furnace 4 (Polymer Curing Tube) Cleanroom - Pettit
Malvern Zetasizer Cleanroom - Marcus Organic
Oxford Cryogenic ICP Cleanroom - Marcus Inorganic
Oxford End-point RIE Cleanroom - Marcus Inorganic
Oxford ICP PECVD Cleanroom - Marcus Inorganic
PlasmaTherm ICP Cleanroom - Pettit
Plasma-Therm PECVD Cleanroom - Pettit
Plasma-Therm RIE Cleanroom - Pettit
Plasma-Therm SLR RIE Cleanroom - Pettit
PVD75 Filament Evaporator Cleanroom - Marcus Inorganic
PVD75 RF Sputterer Cleanroom - Marcus Inorganic
Q-sense QCM-D Cleanroom - Marcus Organic
SemiTest SCA-2500 Surface Charge Analyzer Cleanroom - Pettit
STS AOE ICP Cleanroom - Pettit
STS ICP Cleanroom - Pettit
STS PECVD Cleanroom - Pettit
STS PECVD 2 Cleanroom - Pettit
STS Pegasus ICP Cleanroom - Pettit
STS SOE ICP Cleanroom - Pettit
Tousimis Super Critical Dryer Cleanroom - Pettit
Tystar Nitride Furnace 1 Cleanroom - Pettit
Tystar Nitride Furnace 2 Cleanroom - Pettit
Tystar Nitride Furnace 3 Cleanroom - Pettit
Tystar Nitride Furnace 4 Cleanroom - Pettit
Tystar Poly Furnace 1 Cleanroom - Pettit
Tystar Poly Furnace 2 Cleanroom - Pettit
Tystar Poly Furnace 3 Cleanroom - Pettit
Tystar Poly Furnace 4 Cleanroom - Pettit
Unaxis PECVD Cleanroom - Pettit
Unifilm Sputterer Cleanroom - Marcus Inorganic
Vision RIE 1 Cleanroom - Pettit
Vision RIE 2 Cleanroom - Marcus Inorganic
Woollam Ellipsometer Cleanroom - Pettit
Wyko Profilometer NT3300 Cleanroom - Marcus Inorganic
Xactix Xenon Difluoride Etcher Cleanroom - Marcus Inorganic

IEN Micro- and Nano-Fabrication Service Center Rates (Direct Costs)

The IEN Micro and Nano Fabrication Service Center provides cleanroom and laboratory consulting, processing, and measurement services for research groups who need assistance in designing and/or executing nano- and micro-technology work. Service center staff can assist with project budgets based on the following established rates (direct costs):

US Academic Rate1
(Direct Costs)
Foreign Academic/Industry Rate
(Direct Costs)
Staff operation or technical consultation $100/Hour $100/Hour
Cleanroom fee for use of cleanroom tool set $20/Hour $20/Hour
Lab tool fee (for stand- alone hourly equipment tool usage) See posted hourly rates See posted hourly rates

Mask Shop

Academic Rate1
(Direct Costs)
Foreign Academic / Industry Rate
(Direct Costs)
Staff operation or technical consultation $100/Hour $100/Hour
Contact Print and Photomask Production tool time $20/Hour $20/Hour
Contact IEN staff for a free quote on mask shop work. Costs for contact prints using the rates listed above are generally $60 dollars. Costs for photomasks using the rates listed above start at $120 and range upward depending upon file size.

Electron Beam Laboratory

Electron Beam Laboratory (Direct costs):

Academic Rate1
(Direct Costs)
Foreign Academic / Industry Rate
(Direct Costs)
Staff operation or technical consultation $100/Hour $100/Hour
JEOL JBX-9300FS EBL System (rates as posted above) $110/Hour $300/Hour
Note on additional costs: The JEOL is located inside of the Pettit Inorganic Cleanroom. On site users of the JEOL JBX-9300FS EBL system are subject to the Pettit Inorganic cleanroom monthly entry and hourly usage fees posted above.

Overhead Costs

The current fiscal year Facilities & Administrative (F&A) rates (a.k.a. overhead or indirects) can be found at http://www.osp.gatech.edu/rates/.

Rate Examples

The following are examples of charges for only being inside of a cleanroom. These examples do not include any equipment time, just how a user is charged for entering the cleanroom(s). Lab equipment is only billed at the hourly rate. Some equipment (as noted above) that is located in a cleanroom is always billed the hourly cleanroom rate of $20 per hour, even if you are not physically inside of the cleanroom.

Example 1: Marcus Inorganic and Pettit Cleanrooms Only

User uses the cleanrooms for 40 hours over the course of 1 month.

US Academic1 Foreign Academic/Industry
Entry Fee $200 * 1 months = $200 $550 * 1 months = $550
Hourly Fee $20 * 40 hours = $800 $20 * 40 hours = $800
Total Direct Cost $1000 $1350

Example 2: Marcus Inorganic and Pettit Cleanrooms Only

User uses the cleanrooms for 40 hours over the course of 3 months.

US Academic1 Foreign Academic/Industry
Entry Fee $200 * 3 months = $600 $550 * 3 months = $1650
Hourly Fee $20 * 40 hours = $800 $20 * 40 hours = $800
Total Direct Cost $1400 $2450

Example 3: Marcus Inorganic and Pettit Cleanrooms Only

User uses the cleanrooms for 140 hours over the course of 2 months.

US Academic1 Foreign Academic/Industry
Entry Fee $200 * 2 months = $400 $550 * 2 months = $1100
Hourly Fee $20 * 120 hours (due to cap) = $2400 $20 * 140 hours = $2800
Total Direct Cost $2800 $3900

Example 4: Marcus Organic Cleanroom Only

User uses the organic cleanroom for 140 hours over the course of 3 months.

US Academic1 Foreign Academic/Industry
Entry Fee $0 * 3 month = $0 $0 * 3 month = $0
Hourly Fee $20 * 120 hours (due to cap) = $2400 $20 * 140 hours = $2800
Total Direct Cost $2400 $2800

Example 5: Marcus Organic Cleanroom Only

User uses organic cleanroom for 30 hours over the course of 1 month.

US Academic1 Foreign Academic/Industry
Entry Fee $0 * 1 month = $0 $0 * 1 month = $0
Hourly Fee $20 * 30 hours = $600 $20 * 30 hours = $600
Total Direct Cost $600 $600

Example 6: Use of All Cleanrooms

User uses the organic cleanroom only for 30 hours over the course of 1 month (September) and the inorganic cleanrooms for 50 hours in 2 other months (October and November).

US Academic1 Foreign Academic/Industry
Entry Fee $0 * 1 month + $200 * 2 months = $400 $0 * 1 month + $550 * 2 months = $1100
Hourly Fee $20 * 80 hours = $1600 $20 * 80 hours = $1600
Total Direct Cost $2000 $2700

Example 7: Use of All Cleanrooms

User uses the organic cleanroom only for 30 hours over the course of 1 month (June) and the inorganic cleanrooms for 50 hours in 3 other months (June, July, August).

US Academic1 Foreign Academic/Industry
Entry Fee $200 * 3 months (organic entry waived) = $600 $550 * 3 months (organic entry waived) = $1650
Hourly Fee $20 * 80 hours = $1600 $20 * 80 hours = $1600
Total Direct Cost $2200 $3250
1US Academic rates include users from Georgia Tech, external academic institutions, and government labs.